Ultra-clean high-purity electronic grade reagent device optimization control solution
Category:
Intelligent control system
Better Your Technology
Our goal:Maintain investment rate above 95%, and reduce the fluctuation of key indicators by more than 30%.
Current Situation, Problem
At present, the demand for ultra-clean and high-purity reagents in high-tech related industries such as photovoltaic manufacturing, integrated circuits and glass thinning at home and abroad is increasing, and the purity requirements are gradually increasing. Domestic high-purity reagent manufacturers face the challenge of improving product purity, reducing material consumption, and using technology to improve competitiveness. In general, the following problems are faced:
(1) Semi-continuous process production with low degree of automation.
(2) The key process parameters cannot be directly measured, and the product quality fluctuates greatly.
(3) Lack of process quality management monitoring (SPC) and alarm systems.
(4) The production cannot be targeted, and the production process cannot be standardized.
Advanced control system, SPC, alarm and automatic reporting system can solve the above problems of ultra-clean and high-purity reagent production process, achieve stable production, ensure product quality requirements, and reduce material consumption.
Solution
Advanced control and related intelligent software can solve the problems faced by the current ultra-clean high-purity reagent production.
The introduction of soft instrumentation technology (VOA) predicts unmeasured key parameters and uses advanced control (APC) for precise control.
The whole set consists of a series of parallel connection of several different rectification units for removing different impurities. Through the quantitative relationship between heat and production, the thermal load is adjusted to achieve single tower material balance, and on this basis, the production target control of the entire device is achieved.
Design product purity controller, card edge control product purity specifications, to meet the purity and material consumption requirements.
Make full use of the practicality of statistics in the field of ultra-clean and high-purity reagents, establish SPC monitoring, and ensure that the working conditions are in a controlled state in real time. The alarm can not only realize the alarm according to the level but also the alarm statistics (cause, frequency, etc.) to ensure the safety of the device. Reports can be used to calculate parameters and operation records, frequency statistics and queries.
Typical Case
Ultra-clean high-purity reagents usually have strong corrosiveness. In order to ensure the purity of the reagents, the production process is very strict: the raw materials need to be pretreated, the equipment materials are required to be special, and the analytical testing instruments require high precision. Moreover, some of the measuring instruments cannot be installed due to secondary pollution caused by corrosion, so many key parameters cannot be measured online.
Zhejiang Bangye Technology Co., Ltd. has rich experience in VOA use, and constructs linear and nonlinear mechanisms or empirical models through multiple process variable measurements to achieve the purpose of predicting key parameters. VOAs can be corrected using trusted laboratory assay values to eliminate the effects of model bias and unmeasurable disturbances.
Through VOA online prediction to provide the basis for real-time key variables, Zhejiang Bangye Technology combines VOA and APC control technology to design and develop ultra-clean high-purity reagent advanced control system. After the APC system is applied, the fluctuation of key process parameters is reduced by more than 35%. The stability is improved, the equipment consumption is reduced, and the labor intensity of the operator is greatly reduced.
Fig. 1 is a comparison diagram of the temperature control effect of the tower kettle of the apparatus, and the temperature fluctuation of the tower kettle is significantly reduced after the application.
Advanced control can not only achieve stable production of a single rectification column, but also achieve material balance control of multiple rectification columns on this basis. As shown in Fig. 2, when the load of the latter rectification tower is adjusted, the controller timely adjusts the feeding and recovery of the previous rectification tower to achieve the purpose of maintaining the balance of the materials of the plurality of rectification towers. The whole purification system has a long process, and advanced control can coordinate multiple sets of distillation column materials to enter and exit, realize rapid adjustment of system load and ensure stable operation of the distillation column, and manual operation is difficult. Figure 2 shows the yield target control effect.
Ultra-clean, high-purity reagents are often the raw material for downstream products, and their purity fluctuations are critical to the quality of subsequent products. SPC is an effective quality management tool that monitors the production process, identifies and reduces abnormal fluctuations in process parameters, and keeps production under control for quality control purposes.
Each point on behalf of the working condition of each time period, the yellow line for 3 & sigma; On the floor, on the red line for technical index specification limit. Can be set to different rules, according to needs, monitoring abnormal, prompt alarm, guide improvement.
The state-owned SPC software has achieved remarkable results through actual factory application. The overall has the advantages of comprehensive functions, flexible configuration, stable and reliable: (1) It is applicable to continuous or semi-continuous processes, and can flexibly configure the conditions for opening and stopping, and has the function of opening and stopping time statistics. (2) Support Xbar map online calculation refresh, real-time monitoring of equipment conditions. (3) Support some online modification of parameters, such as control upper and lower limits, upper and lower limits of specifications. (4) With offline statistics Xbar map, control map, normal distribution map, process capability index map (PCI) and so on. (5) Support SPC online abnormal alarm (6) Support the export of control charts, process capability maps, etc.
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